The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2017
Filed:
Sep. 02, 2015
Applicant:
Mks Instruments, Inc., Andover, MA (US);
Assignee:
MKS Instruments, Inc., Andover, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02M 5/00 (2006.01); H05H 1/24 (2006.01); H02M 7/537 (2006.01);
U.S. Cl.
CPC ...
H05H 1/24 (2013.01); H02M 7/537 (2013.01);
Abstract
A power system for a reactive gas generator can include a direct three phase inverter. A resonant tank can further be included to receive a square wave output of the direct three phase inverter and provide a sine wave output. The power system can include an inverter controller that turns on and off selected switches of the direct three phase inverter based on states of the three phases of a three phase AC power supply, where a switch is turned on with an adaptive ON time and a modulated OFF time depending on a desired output power.