The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 09, 2017

Filed:

May. 25, 2012
Applicants:

Chuang-chuang Tsai, Hsinchu, TW;

Hsiao-wen Zan, Hsinchu, TW;

Hsin-fei Meng, Hsinchu, TW;

Chun-cheng Yeh, Hsinchu, TW;

Inventors:

Chuang-Chuang Tsai, Hsinchu, TW;

Hsiao-Wen Zan, Hsinchu, TW;

Hsin-Fei Meng, Hsinchu, TW;

Chun-Cheng Yeh, Hsinchu, TW;

Assignee:

E INK HOLDINGS INC., Hsinchu, TW;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/22 (2006.01); H01L 51/30 (2006.01); H01L 29/786 (2006.01);
U.S. Cl.
CPC ...
H01L 29/78696 (2013.01); H01L 29/78606 (2013.01); H01L 29/78693 (2013.01);
Abstract

A metal oxide semiconductor transistor includes a gate, a metal oxide active layer, a gate insulating layer, a source, and a drain. The metal oxide active layer has a first surface and a second surface, and the first surface faces to the gate. The gate insulating layer is disposed between the gate and the metal oxide active layer. The source and the drain are respectively connected to the metal oxide active layer. The second surface defines a mobility enhancing region between the source and the drain. An oxygen content of the metal oxide active layer in the mobility enhancing region is less than an oxygen content of the metal oxide active layer in the region outside the mobility enhancing region. The metal oxide semiconductor transistor has high carrier mobility.


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