The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2017
Filed:
Jun. 06, 2013
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventor:
Rudolf Brunner, Mountain View, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 5/00 (2006.01); G02B 26/02 (2006.01); G02B 26/06 (2006.01);
U.S. Cl.
CPC ...
G02B 5/005 (2013.01); G02B 26/02 (2013.01); G02B 26/06 (2013.01);
Abstract
A system for providing flexible optical aperture shapes in an optical inspection system (e.g., an optical wafer inspection system) is described. The system includes one or more mechanisms for providing multiple optical aperture shapes along an optical beam path in the optical wafer inspection system. The multiple optical apertures shapes are stacked or overlapped to combine the shapes and form a single combined optical aperture shape along the optical beam path.