The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 09, 2017

Filed:

Nov. 26, 2014
Applicant:

Lawrence Livermore National Security, Llc, Livermore, CA (US);

Inventors:

Qinghui Shao, Fremont, CA (US);

Adam Conway, Livermore, CA (US);

Rebecca J. Nikolic, Oakland, CA (US);

Lars Voss, Livermore, CA (US);

Ishwara B. Bhat, Clifton Park, NY (US);

Sara E. Harrison, Fremont, CA (US);

Assignees:

Lawrence Livermore National Security, LLC, Livermore, CA (US);

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01T 3/00 (2006.01); G01T 3/08 (2006.01); H01L 31/117 (2006.01);
U.S. Cl.
CPC ...
G01T 3/08 (2013.01); H01L 31/117 (2013.01);
Abstract

In one embodiment, an apparatus includes: a first layer including a n+ dopant or p+ dopant; an intrinsic layer formed above the first layer, the intrinsic layer including a planar portion and pillars extending above the planar portion, cavity regions being defined between the pillars; and a second layer deposited on a periphery of the pillars thereby forming coated pillars, the second layer being substantially absent on the planar portion of the intrinsic layer between the coated pillars. The second layer includes an n+ dopant when the first layer includes a p+ dopant. The second layer includes a p+ dopant when the first layer includes an n+ dopant. The apparatus includes a neutron sensitive material deposited between the coated pillars and above the planar portion of the intrinsic layer. In additional embodiments, an upper portion of each of the pillars includes a same type of dopant as the second layer.


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