The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2017
Filed:
Jul. 02, 2012
Cor Verburg, Monster, NL;
Robert Mossel, Capelle a/d Ijssel, NL;
Kaustubh Prabodh Padhye, Zoetermeer, NL;
Eric DE Kok, Nootdorp, NL;
Willem Jacob Vis, Zoetermeer, NL;
Cor Verburg, Monster, NL;
Robert Mossel, Capelle a/d Ijssel, NL;
Kaustubh Prabodh Padhye, Zoetermeer, NL;
Eric de Kok, Nootdorp, NL;
Willem Jacob Vis, Zoetermeer, NL;
MAPPER LITHOGRAPHY IP B.V., Delft, NL;
Abstract
A measurement system for measuring an input electrical current (Ics) from a current source (CS) and generating a current measurement signal, comprising a current measuring circuit () having a first input terminal () connected to the current source and an output terminal () for providing the current measurement signal. The current measuring circuit further comprises one or more power supply terminals () arranged to receive one or more voltages from a power supply () for powering the current measuring circuit. The current measuring circuit also comprises a first voltage source (VD) coupled to the one or more power supply terminals, the first voltage source providing a disturbance voltage to the one or more power supply terminals, the disturbance voltage representing a voltage at the first input terminal.