The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 09, 2017

Filed:

Aug. 19, 2015
Applicant:

Samsung Display Co., Ltd., Yongin-si, Gyeonggi-do, KR;

Inventors:

Youmin Cha, Yongin-si, KR;

Sangho Yun, Yongin-si, KR;

Sungwoong Joo, Yongin-si, KR;

Assignee:

Samsung Display Co., Ltd., Yongin-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/00 (2006.01); H01L 21/687 (2006.01); H01L 21/677 (2006.01); C23C 14/24 (2006.01); H01L 21/67 (2006.01); C23C 14/04 (2006.01); C23C 14/56 (2006.01);
U.S. Cl.
CPC ...
C23C 14/24 (2013.01); C23C 14/042 (2013.01); C23C 14/566 (2013.01); C23C 14/568 (2013.01); H01L 21/67161 (2013.01); H01L 21/67196 (2013.01); H01L 21/67207 (2013.01); H01L 51/001 (2013.01);
Abstract

An apparatus for manufacturing a display device, the apparatus including a loading chamber configured to receive a substrate from outside, a transfer chamber connected to the loading chamber and including a robot arm configured to transport the substrate, a deposition chamber connected to the transfer chamber and configured to deposit a deposition material onto the substrate after the substrate is transported to the deposition chamber from the transfer chamber, a mask supply chamber connected to the deposition chamber and configured to supply, to the deposition chamber, one of a plurality of masks stacked in the mask supply chamber, and a station connected to the mask supply chamber and configured to supply the plurality of masks, one by one, to the mask supply chamber.


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