The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 02, 2017
Filed:
Sep. 09, 2014
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
John Keller, Newburgh, NY (US);
Noel Smith, Lake Oswego, OR (US);
Roderick Boswell, O'Connor, AU;
Lawrence Scipioni, Bedford, MA (US);
Christine Charles, O'Connor, AU;
Orson Sutherland, Leiden, NL;
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/04 (2006.01); H01J 37/32 (2006.01); H01J 27/16 (2006.01); H01J 37/08 (2006.01); H01J 37/24 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32183 (2013.01); H01J 27/16 (2013.01); H01J 37/08 (2013.01); H01J 37/241 (2013.01); H01J 37/321 (2013.01); H01J 37/3211 (2013.01); H01J 37/32669 (2013.01); H01J 2237/0815 (2013.01);
Abstract
The present invention provides an inductively coupled, magnetically enhanced ion beam source, suitable to be used in conjunction with probe-forming optics to produce an ion beam without kinetic energy oscillations induced by the source.