The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 02, 2017

Filed:

Oct. 31, 2013
Applicant:

Carl Zeiss X-ray Microscopy, Inc., Pleasanton, CA (US);

Inventors:

Michael Feser, Orinda, CA (US);

Alan Francis Lyon, Berkeley, CA (US);

Assignee:

Carl Zeiss X-Ray Microscopy, Inc., Pleasanton, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G21K 1/00 (2006.01); G21K 1/06 (2006.01); G21K 7/00 (2006.01);
U.S. Cl.
CPC ...
G21K 1/00 (2013.01); G21K 1/06 (2013.01); G21K 7/00 (2013.01); G21K 2201/06 (2013.01); G21K 2201/067 (2013.01);
Abstract

A compound x-ray lens and method of fabricating these lenses are disclosed. These compound lenses use multiple zone plate stacking to achieve a pitch frequency increase for the resulting combined zone plate. The compound equivalent zone plate includes a first zone plate having an initial pitch frequency stacked onto a second zone plate to form an equivalent compound zone plate. The equivalent zone plate has a pitch frequency that is at least twice the initial pitch frequency. Also, in one example, the equivalent zone plate has a mark-to-space ratio of 1:1.


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