The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 02, 2017
Filed:
Mar. 28, 2013
Applicants:
Asml Netherlands B.v., Veldhoven, NL;
Tno, Delft, NL;
Inventors:
Antonius Martinus Cornelis Petrus De Jong, Pijnacker, NL;
Jacques Cor Johan Van Der Donck, Alphen aan den Rijn, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01); G01N 21/94 (2006.01); G03F 7/20 (2006.01); G03F 1/82 (2012.01); B32B 37/24 (2006.01); B32B 38/10 (2006.01); G01N 21/956 (2006.01); G01N 21/47 (2006.01); G01N 1/02 (2006.01); G01N 1/28 (2006.01);
U.S. Cl.
CPC ...
G01N 21/94 (2013.01); B32B 37/24 (2013.01); B32B 38/10 (2013.01); G01N 21/956 (2013.01); G03F 1/82 (2013.01); G03F 7/7085 (2013.01); G03F 7/70908 (2013.01); B32B 2037/243 (2013.01); G01N 21/47 (2013.01); G01N 2001/028 (2013.01); G01N 2001/2833 (2013.01); G01N 2201/06113 (2013.01); G01N 2201/105 (2013.01);
Abstract
A particulate contamination measurement method and apparatus are discussed. The method, for example, comprises pressing a measurement surface () of a polyurethane elastomer () against a surface () to be measured, removing the polyurethane elastomer from the surface without leaving residues, then using an optical apparatus () to detect particles () which have been removed by the polyurethane elastomer from the surface and which have become attached to the polyurethane elastomer.