The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 02, 2017
Filed:
Oct. 23, 2014
Applicant:
Surmet, Corp., Burlington, MA (US);
Inventors:
Suri A. Sastri, Lexington, MA (US);
Sreeram Balasubramanian, Ashland, MA (US);
Lee M. Goldman, Alliance, OH (US);
Assignee:
SURMET CORPORATION, Burlington, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C01B 21/082 (2006.01); C04B 35/581 (2006.01); C04B 35/58 (2006.01); C04B 35/626 (2006.01); C04B 35/645 (2006.01); C04B 35/64 (2006.01); C04B 41/00 (2006.01);
U.S. Cl.
CPC ...
C04B 35/58 (2013.01); C01B 21/0825 (2013.01); C04B 35/581 (2013.01); C04B 35/6261 (2013.01); C04B 35/64 (2013.01); C04B 35/6455 (2013.01); C04B 41/0072 (2013.01); C01P 2006/80 (2013.01); C04B 2235/3895 (2013.01); C04B 2235/602 (2013.01); C04B 2235/72 (2013.01); C04B 2235/763 (2013.01); C04B 2235/77 (2013.01);
Abstract
A method of making high purity crystalline AlON bodies by synthesizing and calcining AlON powders having less than 80 ppm Si, Mg, Ca, Na, and K impurities. The AlON powders are milled to reduce the particle size of the AlON powders using a high purity milling media. An AlON body is formed from the milled AlON powders. Such AlON bodies are particularly suitable for semiconductor process chamber components.
Quick Actions:
Sastri, Suri. (2017). Method of making high purity polycrystalline aluminum oxynitride bodies useful in semiconductor process chambers (U.S. Patent No. 9637415). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9637415
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile