The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2017
Filed:
Feb. 03, 2016
Applicant:
Cymer, Llc, San Diego, CA (US);
Inventor:
Rahul Ahlawat, San Diego, CA (US);
Assignee:
Cymer, LLC, San Diego, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/22 (2006.01); H01S 3/104 (2006.01); H01S 3/097 (2006.01); H01S 3/134 (2006.01); H01S 3/139 (2006.01); H01S 3/225 (2006.01); H01S 3/137 (2006.01); H01S 3/0971 (2006.01); H01S 3/1055 (2006.01); H01S 3/23 (2006.01); H01S 3/036 (2006.01); H01S 3/10 (2006.01);
U.S. Cl.
CPC ...
H01S 3/104 (2013.01); H01S 3/09705 (2013.01); H01S 3/134 (2013.01); H01S 3/139 (2013.01); H01S 3/22 (2013.01); H01S 3/2251 (2013.01); H01S 3/2256 (2013.01); H01S 3/036 (2013.01); H01S 3/0971 (2013.01); H01S 3/1055 (2013.01); H01S 3/10069 (2013.01); H01S 3/137 (2013.01); H01S 3/225 (2013.01); H01S 3/2308 (2013.01); H01S 2301/02 (2013.01);
Abstract
A pulsed light beam emitted from an optical source is received, the pulsed light beam being associated with a temporal repetition rate; a frequency of a disturbance in the optical source is determined, the frequency being an aliased frequency that varies with the temporal repetition rate of the pulsed light beam; a correction waveform is generated based on the aliased frequency; and the disturbance in the optical source is compensated by modifying a characteristic of the pulsed light beam based on the generated correction waveform.