The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2017
Filed:
Nov. 03, 2014
Entegris, Inc., Billerica, MA (US);
Ronald Chiarello, Lafayette, CA (US);
Shad Pierson, Walnut Creek, CA (US);
Christopher Wacinski, Walnut Creek, CA (US);
Mark Arbore, Los Altos, CA (US);
Yevgeny Anoikin, Fremont, CA (US);
Entegris, Inc., Billerica, MA (US);
Abstract
An optical sensor apparatus includes an optically transmissive structure (e.g., a prism) having two planar faces and a third planar face that connects the two planar faces, two or more light sources located outside the structure, and a photodetector array located outside the prism. The structure, light sources, and photodetector array are configured such that light from the light sources that is totally internally reflected at an optical interface between the prism and a sample outside the structure proximate one of the two planar faces is incident on a portion of the photodetector array that depends on a refractive index of the sample. The light sources are positioned with respect to the structure and photodetector array such that the totally internally reflected light from each light source corresponds to a different range of refractive index of the sample and maps to a corresponding portion of the photodetector array.