The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2017
Filed:
Oct. 29, 2013
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Abraham Ravid, San Jose, CA (US);
Dmitry A. Dzilno, Sunnyvale, CA (US);
Todd J. Egan, Fremont, CA (US);
Robert O. Miller, Bayville, NY (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/02 (2006.01); G01B 7/06 (2006.01); C25D 21/12 (2006.01); G01N 27/20 (2006.01); C25D 17/00 (2006.01); C25D 7/12 (2006.01); C25D 17/12 (2006.01);
U.S. Cl.
CPC ...
G01B 7/105 (2013.01); C25D 17/001 (2013.01); C25D 21/12 (2013.01); G01N 27/20 (2013.01); C25D 7/123 (2013.01); C25D 17/12 (2013.01);
Abstract
A measurement tool for measuring an electrical parameter of a metal film deposited on a front side of a workpiece includes an electrical sensor connected to a workpiece contact point, an energy beam source with a beam impact location on the front side, a holder and a translation mechanism capable of translating the holder relative to the workpiece support, the beam source supported on the holder, and a computer programmed to sense a behavior of an electrical parameter sensed by the sensor.