The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2017
Filed:
Jan. 17, 2014
Applicant:
Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, TW;
Inventors:
Wei-Pin Huang, Miaoli County, TW;
Wen-Chi Chien, Miaoli County, TW;
Bing-Yuan Cheng, Hsinchu County, TW;
Feng-Ning Lee, Taoyuan County, TW;
Wei-Cheng Wang, Taoyuan County, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01); G01N 21/63 (2006.01); G01N 21/21 (2006.01); G01N 21/47 (2006.01); C07D 237/32 (2006.01); G05B 19/418 (2006.01); C07D 401/10 (2006.01); C07D 401/12 (2006.01); C07D 403/10 (2006.01); C07D 403/12 (2006.01); C07D 405/12 (2006.01); C07D 413/12 (2006.01); C07D 417/12 (2006.01); C07D 417/14 (2006.01); C07D 513/04 (2006.01);
U.S. Cl.
CPC ...
C07D 237/32 (2013.01); C07D 401/10 (2013.01); C07D 401/12 (2013.01); C07D 403/10 (2013.01); C07D 403/12 (2013.01); C07D 405/12 (2013.01); C07D 413/12 (2013.01); C07D 417/12 (2013.01); C07D 417/14 (2013.01); C07D 513/04 (2013.01); G05B 19/418 (2013.01); G05B 19/4189 (2013.01); G05B 2219/31033 (2013.01); G05B 2219/32278 (2013.01); Y02P 90/04 (2015.11); Y02P 90/28 (2015.11);
Abstract
A method is provided. The method includes: assigning a buffer to a first wafer lot comprising a plurality of wafers according to a first trigger event associated with an equipment; and assigning a transporter to a second wafer lot comprising a plurality of wafers according to a second trigger event associated with the equipment.