The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2017
Filed:
Feb. 24, 2016
Jefferson Science Associates, Llc, Newport News, VA (US);
David R. Douglas, Yorktown, VA (US);
Lucas J. P. Ament, New York, NY (US);
JEFFERSON SCIENCE ASSOCIATES, LLC, Newport News, VA (US);
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A method of controlling e-beam transport where electron bunches with different characteristics travel through the same beam pipe. An RF kicker cavity is added at the beginning of the common transport pipe or at various locations along the common transport path to achieve independent control of different bunch types. RF energy is applied by the kicker cavity kicks some portion of the electron bunches, separating the bunches in phase space to allow independent control via optics, or separating bunches into different beam pipes. The RF kicker cavity is operated at a specific frequency to enable kicking of different types of bunches in different directions. The phase of the cavity is set such that the selected type of bunch passes through the cavity when the RF field is at a node, leaving that type of bunch unaffected. Beam optics may be added downstream of the kicker cavity to cause a further separation in phase space.