The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2017
Filed:
Mar. 14, 2014
Applicants:
Chongwu Zhou, San Marino, CA (US);
Yi Zhang, Beaverton, OR (US);
Luyao Zhang, Los Angeles, CA (US);
Inventors:
Assignee:
University of Southern California, Los Angeles, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C01B 31/04 (2006.01); H01L 21/283 (2006.01); H01L 29/16 (2006.01); H01L 29/66 (2006.01); H01L 29/786 (2006.01); C30B 25/10 (2006.01); H01L 21/762 (2006.01); C30B 25/02 (2006.01); C30B 29/02 (2006.01); C23C 16/26 (2006.01); C23C 16/46 (2006.01);
U.S. Cl.
CPC ...
H01L 29/1606 (2013.01); C01B 31/0453 (2013.01); C23C 16/26 (2013.01); C30B 25/02 (2013.01); C30B 25/10 (2013.01); C30B 29/02 (2013.01); H01L 21/7624 (2013.01); H01L 29/66742 (2013.01); H01L 29/78603 (2013.01); H01L 29/78684 (2013.01); C01B 2204/02 (2013.01); C01B 2204/32 (2013.01);
Abstract
A method for growing a graphene layer on a metal foil includes placing a vessel into a chemical vapor deposition chamber, the vessel having a metal foil positioned therein. The method includes evacuating the chemical vapor deposition chamber, introducing hydrogen gas into the chamber to achieve a first pressure less than atmospheric pressure, heating the atmosphere in the chamber to anneal the metal foil, introducing methane and hydrogen into the chamber to achieve a second pressure less than atmospheric pressure.