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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9627280 B1

PDFFull Text
Expired
Date of Patent:
Apr. 18, 2017

Filed:

May. 23, 2016

Methods for probing semiconductor fins through four-point probe and determining carrier concentrations

Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventors:

Clement Hsingjen Wann, Carmel, NY (US);

Yasutoshi Okuno, Hsin-Chu, TW;

Ling-Yen Yeh, Hsin-Chu, TW;

Chi-Yuan Shih, Hsin-Chu, TW;

Yuan-Fu Shao, Taipei, TW;

Wei-Chun Tsai, Hsin-Chu, TW;

Assignee:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Attorney:

Slater Matsil, LLP

Primary Examiner:

Caleb Henry

Int. Cl.
CPC ...
H01L 21/66 (2006.01); H01L 21/306 (2006.01); H01L 29/06 (2006.01); H01L 29/161 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 22/14 (2013.01); H01L 21/30625 (2013.01); H01L 29/0642 (2013.01); H01L 29/0649 (2013.01); H01L 29/161 (2013.01); H01L 29/66795 (2013.01); H01L 22/34 (2013.01);
Abstract

A method includes probing at least one semiconductor fin using a four-point probe head, with four probe pins of the four-point probe head contacting the at least one semiconductor fin. A resistance of the at least one semiconductor fin is calculated. A carrier concentration of the semiconductor fin is calculated from the resistance.

Find Patent Forward Citations

Wann, Clement. (2017). Methods for probing semiconductor fins through four-point probe and determining carrier concentrations (U.S. Patent No. 9627280). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9627280

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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