The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2017
Filed:
Jul. 20, 2015
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Anthony Graupera, Hillsboro, OR (US);
Charles Otis, Hillsboro, OR (US);
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/05 (2006.01); H01J 37/317 (2006.01); H01J 37/08 (2006.01);
U.S. Cl.
CPC ...
H01J 37/05 (2013.01); H01J 37/08 (2013.01); H01J 37/317 (2013.01); H01J 2237/006 (2013.01); H01J 2237/049 (2013.01); H01J 2237/057 (2013.01); H01J 2237/08 (2013.01); H01J 2237/0817 (2013.01); H01J 2237/0827 (2013.01); H01J 2237/303 (2013.01); H01J 2237/31749 (2013.01);
Abstract
An inductively coupled plasma source having multiple gases in the plasma chamber provides multiple ion species to a focusing column. A mass filter allows for selection of a specific ion species and rapid changing from one species to another.