The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2017
Filed:
Aug. 02, 2012
Applicants:
Krishna Uibel, Waltenhofen, DE;
David W. Worthey, Monroe, GA (US);
Inventors:
Krishna Uibel, Waltenhofen, DE;
David W. Worthey, Monroe, GA (US);
Assignee:
3M INNOVATIVE PROPERTIES COMPANY, Saint Paul, MN (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 17/06 (2006.01); B32B 18/00 (2006.01); F27B 14/10 (2006.01); C30B 11/00 (2006.01); C30B 15/10 (2006.01); C30B 35/00 (2006.01); C23C 18/12 (2006.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
F27B 14/10 (2013.01); C23C 18/1204 (2013.01); C23C 18/127 (2013.01); C23C 18/1212 (2013.01); C23C 18/1275 (2013.01); C30B 11/002 (2013.01); C30B 15/10 (2013.01); C30B 35/002 (2013.01); H01L 31/182 (2013.01); F27B 2014/104 (2013.01); Y02E 10/546 (2013.01); Y02P 70/521 (2015.11);
Abstract
The invention relates to a shaped body comprising a substrate with a firmly adhering separating layer, wherein the separating layer comprises 92-98 wt. % silicon nitride (SiN) and 2-8 wt. % silicon dioxide (SiO) and wherein the separating layer has a total oxygen content of ≦8 wt. % and a hardness of at least 10 HB 2.5/3 according to DIN EN ISO 6506-1.