The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2017
Filed:
Jul. 25, 2011
Toyoji Shinohara, Tokyo, JP;
Kohtaro Kawamura, Tokyo, JP;
Toshiharu Nakazawa, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
An exhaust system () is used for evacuating a chamber of a manufacturing apparatus () for manufacturing semiconductor devices, liquid crystal panels, LEDs, or solar cells. The exhaust system () includes a vacuum pump apparatus () for evacuating the chamber, an exhaust gas treatment apparatus () for treating an exhaust gas discharged from the chamber, and a controller () for controlling the vacuum pump apparatus () and/or the exhaust gas treatment apparatus (). Information of operation process of the manufacturing apparatus (), and the kind of gas and the flow rate of the gas supplied to the manufacturing apparatus () is inputted into the controller () to control the vacuum pump apparatus () and/or the exhaust gas treatment apparatus ().