The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 11, 2017

Filed:

Oct. 30, 2014
Applicant:

Toyota Jidosha Kabushiki Kaisha, Toyota-shi, Aichi-ken, JP;

Inventors:

Jun Okawara, Nisshin, JP;

Yusuke Yamashita, Nagoya, JP;

Satoru Machida, Nagakute, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/36 (2006.01); H01L 29/06 (2006.01); H01L 27/06 (2006.01); H01L 29/739 (2006.01); H01L 29/861 (2006.01); H01L 29/872 (2006.01); H01L 29/08 (2006.01); H01L 29/10 (2006.01); H01L 29/66 (2006.01); H01L 29/417 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7397 (2013.01); H01L 29/0619 (2013.01); H01L 29/08 (2013.01); H01L 29/0804 (2013.01); H01L 29/0821 (2013.01); H01L 29/1095 (2013.01); H01L 29/66348 (2013.01); H01L 29/8611 (2013.01); H01L 29/872 (2013.01); H01L 29/0692 (2013.01); H01L 29/41766 (2013.01);
Abstract

A semiconductor device includes: a semiconductor substrate, an upper electrode, a lower electrode and a gate electrode. In the semiconductor substrate, a body region, a pillar region, and a barrier region are formed. The pillar region has an n-type impurity, is formed on a lateral side of the body region, and extends along a depth from a top surface of the semiconductor substrate to a lower end of the body region. The barrier region has an n-type impurity and is formed on a lower side of the body region and the pillar region. The barrier region is formed on the lower side of the pillar region. An n-type impurity concentration distribution in a depth direction in the pillar region and the barrier region has a maximum value in the pillar region. The n-type impurity concentration distribution has a folding point on a side deeper than the maximum value.


Find Patent Forward Citations

Loading…