The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9620607 B1

PDF
Full Text
Expired
Date of Patent:
Apr. 11, 2017

Filed:

Dec. 04, 2014
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd, Hsin-Chu, TW;

Inventors:

Yu-Lien Huang, Jhubei, TW;

Chin-Chi Wang, New Taipei, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/423 (2006.01); H01L 29/78 (2006.01); H01L 27/092 (2006.01); H01L 29/775 (2006.01); H01L 29/10 (2006.01); H01L 29/06 (2006.01); H01L 29/267 (2006.01); H01L 29/165 (2006.01); H01L 29/205 (2006.01);
U.S. Cl.
CPC ...
H01L 29/42392 (2013.01); H01L 27/092 (2013.01); H01L 29/1033 (2013.01); H01L 29/42356 (2013.01); H01L 29/775 (2013.01); H01L 29/7827 (2013.01); H01L 29/7851 (2013.01); H01L 29/0676 (2013.01); H01L 29/165 (2013.01); H01L 29/205 (2013.01); H01L 29/267 (2013.01); H01L 2029/7858 (2013.01);
Abstract

A gate all around (GAA) device structure, vertical gate all around (VGAA) device structure, horizontal gate all around (HGAA) device structure and fin field effect transistor (FinFET) device structure are provided. The VGAA device structure includes a substrate and an isolation structure formed in the substrate. The VGAA device structure also includes a first transistor structure formed on the substrate, and the first transistor structure includes a vertical structure. The vertical structure includes a source region, a channel region and a drain region, and the channel region is formed between the source region and the drain region. The channel region has a horizontal portion and a sloped portion sloping downward toward the isolation structure. The VGAA device structure further includes a gate stack structure wrapping around the channel region.


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