The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2017
Filed:
May. 07, 2015
Stmicroelectronics (Crolles 2) Sas, Crolles, FR;
Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;
Maurice Rivoire, Meylan, FR;
Viorel Balan, La Buisse, FR;
STMicroelectronics (Crolles 2) SAS, Crolles, FR;
Commissariat A L'Energie Atomique et aux Energies Alternatives, Paris, FR;
Abstract
A structure includes a substrate having an upper surface provided with recesses and coated with a continuous barrier layer topped with a continuous copper layer filling at least the recesses. The structure is planarized by: a) chemical-mechanical polishing of the copper, such a polishing being selective with respect to the barrier layer so that copper remains in the recesses and is set back with respect to the upper surface of the substrate; b) depositing on the exposed surface of the structure a material covering at least the copper at the level of the recesses; and c) chemical-mechanical planarizing of the structure to expose the substrate with the copper remaining buried under the material. Two such structures are then direct bonded to each other with opposite areas of material having a same topology.