The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2017
Filed:
May. 31, 2015
Applicant:
Fei Company, Hillsboro, OR (US);
Inventor:
Reinier Louis Warschauer, Portland, OR (US);
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); G06K 9/32 (2006.01); G06T 7/00 (2017.01);
U.S. Cl.
CPC ...
G06K 9/3216 (2013.01); G06T 7/0004 (2013.01); G06T 7/0042 (2013.01); G06T 7/0081 (2013.01); G06K 9/00 (2013.01); G06K 2009/3225 (2013.01); G06T 2207/30164 (2013.01); G06T 2207/30204 (2013.01);
Abstract
Multiple reference fiducials are formed on a sample on a sample for charged particle beam facilities processing of the sample. As one fiducial is degraded by the charged particle beam, a second fiducial is used to create one or more additional fiducials.