The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2017
Filed:
Nov. 14, 2014
Yue Zhang, Singapore, SG;
Hao Ming Chang, Singapore, SG;
Yue Zhang, Singapore, SG;
Hao Ming Chang, Singapore, SG;
ASM TECHNOLOGY SINGAPORE PTE LTD, Singapore, SG;
Abstract
Disclosed is a leakage detection system () and a leakage detection method for detecting leakage in a gas supply system (') comprising a gas source () connected to a gas delivery module () by a pipeline. The leakage detection system () comprises a flow meter () connectable along the pipeline remotely from an inlet of the gas delivery module (); and a detection module () configured to receive signals representing a measured flow rate from the flow meter (), and to compare the measured flow rate () to a stored leakage-free reference value () to detect an increase in flow rate in the presence of a leak. A flow resistance between the detection module () and an outlet of the gas delivery module () amplifies the increase in flow rate in the presence of a leak. The system () may comprise a flow rate elevation system () connectable between the gas source () and the flow meter () for temporarily increasing the flow rate in the pipeline.