The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2017
Filed:
Jun. 11, 2010
Applicant:
Johannes Jacobus Lambertus Mulders, Eindhoven, NL;
Inventor:
Johannes Jacobus Lambertus Mulders, Eindhoven, NL;
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
C23C 18/14 (2006.01); C23C 18/08 (2006.01);
U.S. Cl.
CPC ...
C23C 18/14 (2013.01); C23C 18/08 (2013.01);
Abstract
The invention provides a method for providing an Au-containing layer onto a surface of a work piece, which method comprises: By using Au(CO)Cl as a precursor for charged particle induced deposition, a gold Au layer may be deposited with a very high purity compared to methods known in the art.