The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2017
Filed:
Nov. 12, 2015
Applicants:
Shuai LI, Beijing, CN;
Wei He, Beijing, CN;
Zhongwei Chen, San Jose, CA (US);
Inventors:
Assignee:
NINGBO FOCUS-EBEAM INSTRUMENTS INC., Ningbo, CN;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/21 (2006.01); H01J 37/145 (2006.01); H01J 37/147 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/145 (2013.01); H01J 37/1477 (2013.01); H01J 37/21 (2013.01); H01J 37/28 (2013.01); H01J 2237/0473 (2013.01); H01J 2237/2802 (2013.01);
Abstract
The present invention provides a scanning transmission electron microscope (STEM). In the STEM, a specimen is sandwiched between a variable axis objective lens and a variable axis collection lens. The axis of the collection lens varies along with the variation of the objective lens axis in a coordinated manner. The STEM of the invention exhibits technical merits such as large scanning field, high image resolution across the entire scanning field, and high throughput, among others.