The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 28, 2017

Filed:

Jan. 29, 2015
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Kathryn C. Fisher, Tempe, AZ (US);

Qiang Huang, Sleepy Hollow, NY (US);

Satyavolu S. Papa Rao, Poughkeepsie, NY (US);

David L. Rath, Stormville, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/18 (2006.01); H01L 31/0216 (2014.01); H01L 31/0224 (2006.01); H01L 31/02 (2006.01);
U.S. Cl.
CPC ...
H01L 31/02168 (2013.01); H01L 31/0201 (2013.01); H01L 31/0216 (2013.01); H01L 31/02167 (2013.01); H01L 31/022425 (2013.01); H01L 31/022433 (2013.01); H01L 31/18 (2013.01); H01L 31/1864 (2013.01); Y02E 10/50 (2013.01);
Abstract

A method of forming a photovoltaic device is provided that includes a p-n junction with a p-type semiconductor portion and an n-type semiconductor portion, wherein an upper exposed surface of one of the semiconductor portions represents a front side surface of the semiconductor substrate. Patterned antireflective coating layers are formed on the front side surface of the semiconductor surface to provide a grid pattern including a busbar region and finger region. A mask having a shape that mimics each patterned antireflective coating layer is provided atop each patterned antireflective coating layer. A metal layer is electrodeposited on the busbar region and the finger regions. After removing the mask, an anneal is performed that reacts metal atoms from the metal layer react with semiconductor atoms from the busbar region and the finger regions forming a metal semiconductor alloy.


Find Patent Forward Citations

Loading…