The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2017
Filed:
Oct. 01, 2015
Applicant:
Stmicroelectronics, Inc., Coppell, TX (US);
Inventor:
Ming Fang, Plano, TX (US);
Assignee:
STMicroelectronics, Inc., Coppell, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); B81C 1/00 (2006.01); B81B 7/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00666 (2013.01); B81B 7/0029 (2013.01); B81C 1/0019 (2013.01); B81B 2203/0181 (2013.01); B81C 2201/0169 (2013.01); B81C 2201/112 (2013.01);
Abstract
A method of manufacturing microstructures, such as MEMS or NEMS devices, including forming a protective layer on a surface of a moveable component of the microstructure. For example, a silicide layer may be formed on a portion of at least four different surfaces of a poly-silicon mass that is moveable with respect to a substrate of the microstructure. The process may be self-aligning.
Quick Actions:
Fang, Ming. (2017). Methods of forming microstructure and electronic device having moveable component (U.S. Patent No. 9604845). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9604845
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile