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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9601365 B1

PDFFull Text
Date of Patent:
Mar. 21, 2017

Filed:

Apr. 28, 2014

Peeling device, peeling system, and peeling method

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Masaru Honda, Koshi, JP;

Ryoichi Sakamoto, Koshi, JP;

Assignee:

TOKYO ELECTRON LIMITED, Tokyo, JP;

Attorneys:

Nath, Goldberg & Meyer

Jerald L. Meyer

Primary Examiner:

Mark A Osele

Assistant Examiner:

Nickolas Harm

Int. Cl.
CPC ...
B32B 38/10 (2006.01); H01L 21/683 (2006.01); H01L 21/67 (2006.01); B32B 43/00 (2006.01); B32B 38/18 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6838 (2013.01); H01L 21/67092 (2013.01); B32B 38/10 (2013.01); B32B 38/1858 (2013.01); B32B 43/006 (2013.01); B32B 2309/62 (2013.01); B32B 2457/14 (2013.01); Y10T 156/1137 (2015.01); Y10T 156/1168 (2015.01); Y10T 156/1179 (2015.01); Y10T 156/19 (2015.01); Y10T 156/1961 (2015.01); Y10T 156/1983 (2015.01);
Abstract

A peeling device separates a superposed substrate, in which a target substrate and a support substrate are joined to each other with an adhesive, into the target substrate and the support substrate. The peeling device includes a holding unit configured to hold the superposed substrate, and a plurality of position adjustment units movable forward and backward with respect to a side surface of the superposed substrate held in the holding unit, and the position adjustment unit configured to perform a position adjustment of the superposed substrate by contacting the side surface of the superposed substrate.

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Honda, Masaru. (2017). Peeling device, peeling system, and peeling method (U.S. Patent No. 9601365). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9601365

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