The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2017
Filed:
Feb. 24, 2016
Applicant:
Fei Company, Hillsboro, OR (US);
Inventor:
Brian Roberts Routh, Jr., Beaverton, OR (US);
Assignee:
FEI COMPANY, Hillsboro, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/30 (2006.01); H01J 37/305 (2006.01); H01J 37/147 (2006.01); H01J 37/10 (2006.01); H01J 37/077 (2006.01); H01J 37/08 (2006.01); H01J 37/285 (2006.01); H01J 27/16 (2006.01); H01J 37/05 (2006.01); H01J 37/304 (2006.01); G01T 1/28 (2006.01); H01J 37/26 (2006.01);
U.S. Cl.
CPC ...
H01J 37/285 (2013.01); G01T 1/28 (2013.01); H01J 27/16 (2013.01); H01J 37/05 (2013.01); H01J 37/077 (2013.01); H01J 37/08 (2013.01); H01J 37/10 (2013.01); H01J 37/1471 (2013.01); H01J 37/265 (2013.01); H01J 37/30 (2013.01); H01J 37/304 (2013.01); H01J 37/305 (2013.01); H01J 37/3056 (2013.01); H01J 2237/0817 (2013.01); H01J 2237/2445 (2013.01); H01J 2237/2448 (2013.01); H01J 2237/24415 (2013.01); H01J 2237/24475 (2013.01); H01J 2237/31749 (2013.01);
Abstract
A single column charged particle source with user selectable configurations operates in ion-mode for FIB operations or electron mode for SEM operations. Equipped with an x-ray detector, energy dispersive x-ray spectroscopy analysis is possible. A user can selectively configure the source to prepare a sample in the ion-mode or FIB mode then essentially flip a switch selecting electron-mode or SEM mode and analyze the sample using EDS or other types of analysis.