The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 21, 2017

Filed:

Dec. 19, 2014
Applicant:

Headway Technologies, Inc., Milpitas, CA (US);

Inventors:

Kunliang Zhang, Fremont, CA (US);

Hui-Chuan Wang, Pleasanton, CA (US);

Junjie Quan, Fremont, CA (US);

Min Li, Fremont, CA (US);

Assignee:

Headway Technologies, Inc., Milpitas, CA (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G11C 11/16 (2006.01); G11B 5/39 (2006.01); C23C 14/34 (2006.01); G01R 33/09 (2006.01); H01F 10/32 (2006.01);
U.S. Cl.
CPC ...
G11B 5/3909 (2013.01); C23C 14/34 (2013.01); G01R 33/096 (2013.01); G01R 33/098 (2013.01); H01F 10/3254 (2013.01);
Abstract

A method of forming a magnetoresistive (MR) sensor with a composite tunnel barrier comprised primarily of magnesium oxynitride and having a MR ratio of at least 70%, resistance x area (RA) product <1 ohm-μm, and fewer pinholes than a conventional MgO layer is disclosed. The method involves forming a Mg/MgON/Mg, Mg/MgON/MgN, MgN/MgON/MgN, or MgN/MgON/Mg intermediate tunnel barrier stack and then annealing to drive loosely bound oxygen into adjacent layers thereby forming MgO/MgON/Mg, MgO/MgON/MgON, MgON/MgON/MgON, and MgON/MgON/MgO composite tunnel barriers, respectively, wherein oxygen content in the middle MgON layer is greater than in upper and lower MgON layers. The MgON layer in the intermediate tunnel barrier may be formed by a sputtering process followed by a natural oxidation step and has a thickness greater than the Mg and MgN layers.


Find Patent Forward Citations

Loading…