The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2017
Filed:
May. 08, 2013
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventor:
Edgar Alberto Osorio Oliveros, Eindhoven, NL;
Assignee:
ASML NETHERLANDS B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/24 (2012.01); G03F 7/20 (2006.01); G21K 1/06 (2006.01); B82Y 10/00 (2011.01); G03F 1/62 (2012.01); G02B 5/08 (2006.01); G02B 27/00 (2006.01); B82Y 30/00 (2011.01);
U.S. Cl.
CPC ...
G03F 7/70916 (2013.01); B82Y 10/00 (2013.01); G02B 5/085 (2013.01); G02B 5/0891 (2013.01); G02B 27/0006 (2013.01); G03F 1/24 (2013.01); G03F 1/62 (2013.01); G03F 7/7015 (2013.01); G03F 7/70958 (2013.01); G21K 1/062 (2013.01); B82Y 30/00 (2013.01); G21K 2201/067 (2013.01); Y10S 977/734 (2013.01);
Abstract
A reflector includes a reflecting surface or structure provided with a cap layer formed from Silicene or a Silicene derivative. The reflector may be provided in a lithographic apparatus.