The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 21, 2017

Filed:

Aug. 13, 2015
Applicant:

Zygo Corporation, Middlefield, CT (US);

Inventors:

Martin F. Fay, Middletown, CT (US);

Xavier Colonna de Lega, Middlefield, CT (US);

Peter J. de Groot, Middletown, CT (US);

Assignee:

Zygo Corporation, Middlefield, CT (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/00 (2006.01); G01M 11/02 (2006.01);
U.S. Cl.
CPC ...
G01M 11/0271 (2013.01); G01M 11/025 (2013.01);
Abstract

A method for determining information about an object including a curved portion and a planar portion, the curved portion having a first curved surface having an apex and defining an axis of the object, includes: directing measurement light to the object; detecting measurement light reflected from the first curved surface of the curved portion; detecting measurement light reflected from at least one other surface of the object; and determining, based on the detected light, information about the apex of the first curved surface of the curved portion.


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