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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9598768 B1

PDFFull Text
Date of Patent:
Mar. 21, 2017

Filed:

Sep. 24, 2008

Method of forming zinc oxide film (zno) or magnesium zinc oxide film (znmgo) and apparatus for forming zinc oxide film or magnesium zinc oxide film

Applicants:

Takahiro Shirahata, Tokyo, JP;

Hiroyuki Orita, Tokyo, JP;

Akio Yoshida, Tokyo, JP;

Masahisa Kogura, Tokyo, JP;

Inventors:

Takahiro Shirahata, Tokyo, JP;

Hiroyuki Orita, Tokyo, JP;

Akio Yoshida, Tokyo, JP;

Masahisa Kogura, Tokyo, JP;

Assignee:

TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION, Tokyo, JP;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Dah-Wei D Yuan

Assistant Examiner:

Jose Hernandez-Diaz

Int. Cl.
CPC ...
C23C 16/448 (2006.01); C23C 16/40 (2006.01); C23C 16/48 (2006.01); C23C 18/12 (2006.01); H01L 21/02 (2006.01); C23C 16/452 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4486 (2013.01); C23C 16/407 (2013.01); C23C 16/452 (2013.01); C23C 16/45523 (2013.01); C23C 16/482 (2013.01); C23C 18/12 (2013.01); C23C 18/1216 (2013.01); C23C 18/1279 (2013.01); C23C 18/1291 (2013.01); H01L 21/0262 (2013.01); H01L 21/02554 (2013.01); H01L 21/02565 (2013.01); H01L 21/02628 (2013.01);
Abstract

A method of forming a zinc oxide film or a magnesium zinc oxide film which has a high transmittance. The method of forming a zinc oxide film or a magnesium zinc oxide film includes (A) converting a solution containing zinc, or zinc and magnesium into mist, (B) heating a substrate, and (C) supplying the solution converted into mist, and ozone to a first main surface of the substrate under heating.

Find Patent Forward Citations

Shirahata, Takahiro. (2017). Method of forming zinc oxide film (zno) or magnesium zinc oxide film (znmgo) and apparatus for forming zinc oxide film or magnesium zinc oxide film (U.S. Patent No. 9598768). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9598768

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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