The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 14, 2017

Filed:

May. 05, 2016
Applicant:

Everspin Technologies, Inc., Chandler, AZ (US);

Inventors:

Sarin A. Deshpande, Chandler, AZ (US);

Sanjeev Aggarwal, Scottsdale, AZ (US);

Kerry Joseph Nagel, Scottsdale, AZ (US);

Chaitanya Mudivarthi, Sunnyvale, CA (US);

Nicholas Rizzo, Gilbert, AZ (US);

Jason Allen Janesky, Gilbert, AZ (US);

Assignee:

Everspin Technologies, Inc., Chandler, AZ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 43/12 (2006.01); H01L 43/08 (2006.01); H01L 27/22 (2006.01);
U.S. Cl.
CPC ...
H01L 43/12 (2013.01); H01L 27/222 (2013.01); H01L 43/08 (2013.01);
Abstract

In forming a top electrode for a magnetoresistive device, photoresist used in patterning the electrode is stripped using a non-reactive stripping process. Such a non-reactive stripping process uses water vapor or some other non-oxidizing gas that also passivates exposed portions the magnetoresistive device. In such magnetoresistive devices, a non-reactive spacer layer is included that helps prevent diffusion between layers in the magnetoresistive device, where the non-reactive nature of the spacer layer prevents sidewall roughness that can interfere with accurate formation of the lower portions of the magnetoresistive device.


Find Patent Forward Citations

Deshpande, Sarin. (2017). Non-reactive photoresist removal and spacer layer optimization in a magnetoresistive device (U.S. Patent No. 9595665). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9595665

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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