The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2017
Filed:
Sep. 14, 2012
Applicants:
Yuli Vladimirsky, Weston, CT (US);
Robert Tharaldsen, Sherman, CT (US);
Inventors:
Yuli Vladimirsky, Weston, CT (US);
Robert Tharaldsen, Sherman, CT (US);
Assignee:
ASML HOLDING N.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 1/42 (2006.01); G01N 21/956 (2006.01); G03F 7/20 (2006.01); G03F 1/84 (2012.01); G01N 21/94 (2006.01); G01N 21/95 (2006.01);
U.S. Cl.
CPC ...
G01N 21/956 (2013.01); G01N 21/94 (2013.01); G01N 21/9501 (2013.01); G03F 1/84 (2013.01); G03F 7/7065 (2013.01);
Abstract
An apparatus and a method to detect a defect or particle on a surface that involves combining an object radiation beam redirected by the surface with a reference radiation beam having a plurality of intensities lower than the object radiation beam, to produce a plurality of patterns detected by a detector in order to detect the defect or particle on the surface from the patterns.