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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9592574 B1

PDFFull Text
Date of Patent:
Mar. 14, 2017

Filed:

Feb. 11, 2013

Method and apparatus for scribing a substantially planar semiconductor substrate with on-the-fly control of scribing alignment

Applicant:

Advanced Laser Separation International (Alsi) N.v., TL Beuningen, NL;

Inventors:

Guido Martinus Henricus Knippels, Schijndel, NL;

Hans Peter Chall, Molenhoek, NL;

Ivo Libertus Adrianus Maria Pullens, Veghel, NL;

Garrit Willem Ubink, Arnhem, NL;

Assignee:

ASM TECHNOLOGY SINGAPORE PTE. LTD., Singapore, SG;

Attorney:

Pillsbury Winthrop Shaw Pittman

Primary Examiner:

David Vu

Assistant Examiner:

Jonathan Han

Int. Cl.
CPC ...
B23K 26/36 (2014.01); H01L 21/66 (2006.01); B23K 26/08 (2014.01); B23K 26/40 (2014.01); H01L 21/78 (2006.01);
U.S. Cl.
CPC ...
B23K 26/365 (2013.01); B23K 26/083 (2013.01); B23K 26/364 (2015.10); B23K 26/40 (2013.01); H01L 22/10 (2013.01); B23K 2203/50 (2015.10); H01L 21/78 (2013.01);
Abstract

A method of scribing a substrate along a scribeline includes causing a laser beam to impinge on the major surface, the point of impingement of the beam constituting a light spot, the substrate being positioned with respect to the laser beam such that the light spot is disposed proximal to the scribeline. The substrate and laser beam are moved relative to one another, such that the light spot is caused to translate substantially along the scribeline, whereby localized energy is transferred from the laser beam to the substrate along the course of the scribeline. The positioning of the light spot with respect to the scribeline is monitored by imaging a flash of light produced during the relative motion. Image recognition software is used to analyze the image and determine momentary position information. The momentary position information is used to regulate a laser beam position setpoint.

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Knippels, Guido Martinus Henricus. (2017). Method and apparatus for scribing a substantially planar semiconductor substrate with on-the-fly control of scribing alignment (U.S. Patent No. 9592574). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9592574

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