The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 07, 2017

Filed:

Sep. 21, 2015
Applicants:

Bin Liu, Suwon-si, KR;

Sun-min Kim, Incheon, KR;

Shigenobu Maeda, Seongnam-si, KR;

Inventors:

Bin Liu, Suwon-si, KR;

Sun-Min Kim, Incheon, KR;

Shigenobu Maeda, Seongnam-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 29/08 (2006.01); H01L 29/161 (2006.01); H01L 29/167 (2006.01); H01L 29/423 (2006.01); H01L 29/51 (2006.01); H01L 29/786 (2006.01); H01L 29/10 (2006.01); H01L 29/06 (2006.01); H01L 21/324 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7833 (2013.01); H01L 29/0847 (2013.01); H01L 29/1054 (2013.01); H01L 29/161 (2013.01); H01L 29/167 (2013.01); H01L 29/42364 (2013.01); H01L 29/513 (2013.01); H01L 29/66545 (2013.01); H01L 29/785 (2013.01); H01L 29/78684 (2013.01); H01L 29/78696 (2013.01); H01L 21/324 (2013.01); H01L 29/0649 (2013.01);
Abstract

Semiconductor devices are provided including an active layer, a gate structure, a spacer, and a source/drain layer. The active layer is on the substrate and includes germanium. The active layer includes a first region having a first germanium concentration, and a second region on both sides of the first region. The second region has a top surface getting higher from a first portion of the second region adjacent to the first region toward a second portion of the second region far from the first region, and has a second germanium concentration less than the first germanium concentration. The gate structure is formed on the first region of the active layer. The spacer is formed on the second region of the active layer, and contacts a sidewall of the gate structure. The source/drain layer is adjacent to the second region of the active layer.


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