Interdigitated capacitor to integrate with flash memory

Abstract

Some embodiments relate to an integrated circuit (IC). The IC includes a semiconductor substrate including a flash memory region and a capacitor region. A flash memory cell is arranged over the flash memory region and includes a polysilicon select gate arranged between first and second source/drain regions of the flash memory cell. The flash memory cell also includes a control gate arranged alongside the select gate and separated from the select gate by a control gate dielectric layer. A capacitor is arranged over the capacitor region and includes: a polysilicon first capacitor plate and polysilicon second capacitor plate, which are inter-digitated with one another and separated from one another by a capacitor dielectric layer. The capacitor dielectric layer and control gate dielectric layer are made of the same material.