The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 07, 2017

Filed:

Aug. 27, 2015
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Jim S. Liang, Poughkeepsie, NY (US);

Atsushi Ogino, Fishkill, NY (US);

Roger A. Quon, Rhinebeck, NY (US);

Stephen E. Greco, Stamford, CT (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/14 (2006.01); H01L 21/784 (2006.01); H01L 23/528 (2006.01); H01L 23/538 (2006.01); H01L 23/00 (2006.01); H01L 23/535 (2006.01); H01L 23/532 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 23/562 (2013.01); H01L 21/76805 (2013.01); H01L 21/76843 (2013.01); H01L 21/76844 (2013.01); H01L 21/76865 (2013.01); H01L 23/535 (2013.01); H01L 23/53266 (2013.01);
Abstract

Embodiments of the present disclosure provide an integrated circuit (IC) structure with a metal crack stop and methods of forming the same. An IC structure according to embodiments of the present disclosure can include an insulator positioned over a substrate; a barrier film positioned over the insulator; an interlayer dielectric positioned over the barrier film; and a metal crack stop positioned over the substrate and laterally adjacent to each of the insulator, the barrier film, and the interlayer dielectric, wherein the metal crack stop includes a sidewall having a first recess therein, and wherein a horizontal interface between the barrier film and the interlayer dielectric intersects the sidewall of the metal crack stop.


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