The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2017
Filed:
Nov. 07, 2014
Applicant:
Mks Instruments, Inc., Andover, MA (US);
Inventors:
Gerardo A. Brucker, Longmont, CO (US);
Scott C. Heinbuch, Fort Collins, CO (US);
Assignee:
MKS Instruments, Inc., Andover, MA (US);
Primary Examiner:
Int. Cl.
CPC ...
G01L 21/34 (2006.01); G01L 21/32 (2006.01); G01L 21/30 (2006.01); H05B 31/26 (2006.01); H01J 37/04 (2006.01); H01J 41/02 (2006.01); H01J 41/06 (2006.01); H01J 41/00 (2006.01); H01J 37/08 (2006.01); H01J 27/00 (2006.01); H01J 27/02 (2006.01);
U.S. Cl.
CPC ...
G01L 21/34 (2013.01); G01L 21/30 (2013.01); G01L 21/32 (2013.01); H01J 37/04 (2013.01); H01J 41/02 (2013.01); H01J 41/06 (2013.01); H01J 27/00 (2013.01); H01J 27/02 (2013.01); H01J 37/08 (2013.01); H01J 41/00 (2013.01);
Abstract
A Long Lifetime Cold Cathode Ionization Vacuum Gauge Design with an extended anode electrode having an axially directed tip, a cathode electrode, and a baffle structure. The axially directed tip of the anode electrode can have a rounded exterior with a diameter at least 10% greater than the diameter of the anode electrode.