The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 07, 2017

Filed:

Dec. 18, 2013
Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventors:

Yoshiyuki Kobayashi, Miyagi, JP;

Satoshi Taga, Miyagi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 4/08 (2016.01); C23C 4/12 (2016.01); H01M 4/04 (2006.01); H01M 4/139 (2010.01); H01G 11/06 (2013.01); H01G 11/50 (2013.01); H01G 11/86 (2013.01);
U.S. Cl.
CPC ...
C23C 4/128 (2013.01); C23C 4/08 (2013.01); C23C 4/137 (2016.01); H01G 11/06 (2013.01); H01G 11/50 (2013.01); H01G 11/86 (2013.01); H01M 4/0419 (2013.01); H01M 4/139 (2013.01); Y02E 60/122 (2013.01); Y02E 60/13 (2013.01); Y02P 70/54 (2015.11);
Abstract

A time for doping an electrode material on an electrode sheet with a lithium ion can be reduced. The electrode manufacturing apparatus includes a processing chamberto and from which the electrode sheet is loaded and unloaded; a rare gas supply unitconfigured to introduce a rare gas into the processing chamber; an exhaust deviceconfigured to exhaust an inside of the processing chamber to a certain vacuum level; and a lithium thermal spraying unitconfigured to dope a carbon material C with the lithium ion by forming a lithium thin film on the carbon material of the electrode sheet W loaded into the processing chamber while melting and spraying lithium-containing powder.


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