The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2017
Filed:
May. 04, 2015
Entegris, Inc., Billerica, MA (US);
Steven M. Lurcott, Sherman, CT (US);
John E. Q. Hughes, Phoenix, AZ (US);
Peter Wrschka, Phoenix, AZ (US);
Thomas H. Baum, New Fairfield, CT (US);
Donald D. Ware, Woodbury, MN (US);
Peng Zou, Ridgefield, CT (US);
Entegris, Inc., Billerica, MA (US);
Abstract
Systems and methods for delivering fluid-containing feed materials to process equipment are disclosed. A liner-based pressure dispensing vessel is subjected to filling by application of vacuum between the liner and overpack. Multiple feed material flow controllers of different calibrated flow ranges may be selectively operated in parallel for a single feed material. Feed material blending and testing for scale-up may be performed with feed materials supplied by multiple liner-based pressure dispensing containers. A gravimetric system may be used to determine concentration of at least one component of a multi-component solution or mixture.