The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 28, 2017

Filed:

Dec. 11, 2015
Applicant:

Macronix International Co., Ltd., Hsinchu, TW;

Inventor:

Guan-Ru Lee, Kaohsiung, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/115 (2006.01); H01L 23/528 (2006.01); H01L 21/3205 (2006.01); H01L 21/768 (2006.01); H01L 27/06 (2006.01); H01L 21/822 (2006.01);
U.S. Cl.
CPC ...
H01L 27/11578 (2013.01); H01L 21/32055 (2013.01); H01L 21/76877 (2013.01); H01L 21/76886 (2013.01); H01L 21/8221 (2013.01); H01L 23/528 (2013.01); H01L 27/0688 (2013.01); H01L 27/11551 (2013.01); H01L 27/11582 (2013.01);
Abstract

A three-dimensional semiconductor device is provided, comprising: a plurality of ground selection line (GSL) sections separately formed on a substrate, the GSL sections being electrically insulated from each other and extended in parallel to each other, and the GSL sections extending along a first direction; a plurality of stacked structures vertically formed on the GSL sections on the substrate, and each stacked structure comprising alternated semiconductor layers and insulating layers; string selection lines (SSLs) separately formed on the stacked structures, and the string selection lines extending along the first direction; and bit lines disposed above the SSLs and extending along a second direction, the bit lines arranged parallel to each other and in perpendicular to the SSLs and GSL sections, wherein a plurality of memory cells of memory layers respectively defined by the stacked structures, the SSLs, the GSL sections and the bit lines correspondingly.


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