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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9583397 B1

PDFFull Text
Date of Patent:
Feb. 28, 2017

Filed:

May. 11, 2016

Source/drain terminal contact and method of forming same

Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Derya Deniz, Watervliet, NY (US);

Benjamin G. Moser, Malta, NY (US);

Sunit S. Mahajan, Halfmoon, NY (US);

Domingo A. Ferrer Luppi, Clifton Park, NY (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorneys:

Francois Pagette

Hoffman Warnick, LLC

Primary Examiner:

Jaehwan Oh

Int. Cl.
CPC ...
H01L 21/336 (2006.01); H01L 21/8238 (2006.01); H01L 29/45 (2006.01); H01L 21/3205 (2006.01); H01L 21/3215 (2006.01); H01L 21/768 (2006.01); H01L 21/321 (2006.01); H01L 21/285 (2006.01); H01L 21/266 (2006.01);
U.S. Cl.
CPC ...
H01L 21/823814 (2013.01); H01L 21/266 (2013.01); H01L 21/2855 (2013.01); H01L 21/28568 (2013.01); H01L 21/3212 (2013.01); H01L 21/3215 (2013.01); H01L 21/32053 (2013.01); H01L 21/76841 (2013.01); H01L 21/76889 (2013.01); H01L 29/45 (2013.01);
Abstract

One aspect of the disclosure relates to a contact within a dielectric layer to a source/drain terminal of a field-effect-transistor (FET). The contact may include: a titanium-tantalum-silicide at a surface of the source/drain terminal; a barrier layer over the titanium-tantalum-silicide; and a metal over the barrier layer and extending to a top surface of the dielectric layer.

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Deniz, Derya. (2017). Source/drain terminal contact and method of forming same (U.S. Patent No. 9583397). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9583397

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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