The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2017
Filed:
Sep. 03, 2015
Applicant:
Micron Technology, Inc., Boise, ID (US);
Inventors:
Kie Y. Ahn, Chappaqua, NY (US);
Leonard Forbes, Corvallis, OR (US);
Assignee:
Micron Technology, Inc., Boise, ID (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/314 (2006.01); H01L 49/02 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01); H01L 21/28 (2006.01); H01L 21/316 (2006.01); H01L 29/10 (2006.01); H01L 29/51 (2006.01); H01L 29/788 (2006.01); H01L 21/8238 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02192 (2013.01); C23C 16/40 (2013.01); C23C 16/45531 (2013.01); H01L 21/022 (2013.01); H01L 21/0228 (2013.01); H01L 21/28194 (2013.01); H01L 21/3141 (2013.01); H01L 21/3142 (2013.01); H01L 21/31604 (2013.01); H01L 28/40 (2013.01); H01L 28/56 (2013.01); H01L 29/1033 (2013.01); H01L 29/513 (2013.01); H01L 29/517 (2013.01); H01L 29/7881 (2013.01); H01L 21/823857 (2013.01);
Abstract
Electronic apparatus and methods of forming the electronic apparatus include a gallium lanthanide oxide film for use in a variety of electronic systems. The gallium lanthanide oxide film may be structured as one or more monolayers. The gallium lanthanide oxide film may be formed using atomic layer deposition.