The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2017
Filed:
Jul. 29, 2015
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Markus Hauf, Ulm, DE;
Gerald Rothenhoefer, Oberkochen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
The disclosure provides a method of determining an actual input value of an input variable for a control unit of a microlithography imaging device. The actual input value is assigned to a first location of the microlithography optical imaging device. The method includes: a) detecting, at a second location of the microlithography optical imaging device, an actual detection value of a detection variable of a detection device of the microlithography optical imaging device; b) using a second relation to computationally ascertain an actual computational value of the detection variable at the second location; c) comparing the actual computational value of the detection variable with the actual detection value of the detection variable to provide a result; and d) based on the result in c), using a relationship between a first predefinable relation and the second relation to correct the predefinable first relation.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile