The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2017
Filed:
Mar. 16, 2015
Applicant:
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Inventor:
Jun Horikoshi, Annaka, JP;
Assignee:
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/62 (2012.01); G03F 1/64 (2012.01); C09K 11/06 (2006.01); G03F 1/00 (2012.01);
U.S. Cl.
CPC ...
G03F 1/64 (2013.01); C09K 11/06 (2013.01); G03F 1/142 (2013.01); G03F 1/62 (2013.01); C09K 2211/1011 (2013.01); C09K 2211/1033 (2013.01);
Abstract
There is provided a pelliclefor lithography having a frame, a filmand an agglutinant layer(an adhesive to bond the pellicle on a photomask), in which the agglutinant layeris doped with a luminescence material so as to facilitate the inspection of the quality of the adhesion between the agglutinant layerand the photomask; preferably the luminescence material is a kind that glows in response to UV irradiation, and a preferable dosage of the luminescence material is no less than 0.01 mass % but less than 1.0 mass %.