The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2017
Filed:
Jun. 17, 2014
Shin-etsu Chemical Co., Ltd., Chiyoda-ku, JP;
Souichi Fukaya, Niigata, JP;
Yukio Inazuki, Niigata, JP;
SHIN-ETSU CHEMICAL CO., LTD., Chiyoda-ku, JP;
Abstract
In a chamber (), a quartz substrate () having a main surface on which an optical film () is formed is put on a susceptor (). A flash lamp () is housed in a lamp house (), and the optical film () is irradiated with flash light through two quartz plates (and). A transmittance adjustment region () is formed on a surface of the quartz plate () of the two quartz plates (and), and the amount of light with which the optical film () is irradiated has in-plane distribution. If the optical film () is irradiated with the flash light, optical characteristics of the optical film () change depending on the received irradiation energy. Hence, for example, the characteristics of the optical film are not uniform, the optical film is irradiated with flash light having such irradiation energy distribution that cancels the in-plane distribution.